MEMS and NEMS Systems (FSI-TSY)

Academic year 2021/2022
Supervisor: doc. Ing. Stanislav Průša, Ph.D.  
Supervising institute: ÚFI all courses guaranted by this institute
Teaching language: Czech
Aims of the course unit:
The aim of the course is to acquaint students with the principles and with the technological processes of production of MEMS and NEMS systems, such as lithography and surface micro/nano-machining methods. Students will get acquainted with real properties and design of individual types of MEMS and NEMS systems with optimal use of computers. They will also be able to use acquired skills and knowledge in the field of thin-film preparation, electron, and optical microscopy and design.
Learning outcomes and competences:
The course enables students to acquire of necessary knowledge about the design of advanced MEMS and NEMS systems due to their correct mechanical functionality. Students will be systematically acquainted with their functions, production technologies, and their applications so that they can design these mechanisms.
Prerequisites:
kinematics, strength and elasticity, material sciences, surfaces and thin films
Course contents:
This course familiarizes students with the design and technology of MEMS and NEMS systems production. Through case studies, students will learn to design MEMS sensors and actuators that meet a set of specifications (sensitivity, frequency response, accuracy, linearity). Based on the knowledge of basic principles, students will also be able to design MEMS and NEMS systems, to create their production processes, and to make them themselves.
Teaching methods and criteria:
The course is taught in the form of lectures that have the character of explanation of basic principles and theory of the given discipline. The exercises are focused on practical mastery of the subject matter covered in the lectures.
Assesment methods and criteria linked to learning outcomes:
Graded course-unit credit: participation in seminars, at the end of the semester will be evaluated assigned individual project.
Controlled participation in lessons:
Attendance at seminars is obligatory and is monitored by the teacher. The way of compensating missed lessons will be determined by the teacher based on the extent and content of missed lessons.
Type of course unit:
    Lecture  13 × 1 hrs. optionally                  
    Computer-assisted exercise  13 × 1 hrs. compulsory                  
Course curriculum:
    Lecture 1. Introduction to MEMS and NEMS systems
2. Basic principles of micromechanics for MEMS and NEMS systems
3. Basic materials for the design of MEMS and NEMS systems
4. Basic micro and nanotechnology of production, choice of suitable production technology
5. Processes for mass micromachining of MEMS systems
6. Design of MEMS / NEMS actuator using capacitive, electrostatic, thermal principle
7. Design of MEMS / NEMS actuator using piezoresistive, piezoelectric, magnetic and optical principle
8. Design of MEMS / NEMS sensor using capacitive, electrostatic, thermal principle
9. Design of MEMS / NEMS sensor using piezoresistive, piezoelectric, magnetic and optical principle
10. MEMS systems in optoelectronics and biomedicine
11. Application of MEMS in the automotive and aerospace industry
12. Applications of MEMS in informatics and telecommunications
    Computer-assisted exercise Computer aided lectures - design of selected MEMS and NEMS mechanisms.
Literature - fundamental:
1. LEONDES, Cornelius T. (ed.). Mems/Nems: (1) Handbook techniques and applications design methods, (2) Fabrication techniques, (3) manufacturing methods, (4) Sensors and actuators, (5) Medical applications and MOEMS. Springer Science & Business Media, 2007.
2. GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O. Microsensors, MEMS, and smart devices. New York: Wiley, 2001.
3. HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.
4. SESHAN, Krishna. Handbook of Thin Film Deposition. William Andrew, 2001.
5. GAD-EL-HAK, Mohamed. The MEMS handbook. CRC press, 2001.
Literature - recommended:
1. GARDNER, Julian W.; VARADAN, Vijay K.; AWADELKARIM, Osama O. Microsensors, MEMS, and smart devices. New York: Wiley, 2001.
2. HSU, Tai-Ran. MEMS and microsystems: design, manufacture, and nanoscale engineering. John Wiley & Sons, 2008.
The study programmes with the given course:
Programme Study form Branch Spec. Final classification   Course-unit credits     Obligation     Level     Year     Semester  
N-PMO-P full-time study --- no specialisation -- GCr 3 Compulsory 2 1 S