Technology of Low Dimensional Structures (FSI-TNS-A)

Student gets a wide knowledge on basic technologies for fabrication of nanoscale materials and nanostructures, about analytical techniques and related physical principles. Finally, current and future applications in devices are presented as well.

Atomic Physics, Quantum Physics, Solid State Physics, partially Statistical Physics and Thermodynamics.

Fabrication of nanomaterials and nanostructures (0D, 1D, 2D). Top-down and bottom-up approaches. Analytical techniques in nanotechnology. Physics behond the nanotechnology, measurements at nanoscale. Examples of materials, heterostructures and their applications in electronics and optoelectronics.

The course is taught through lectures explaining the basic principles and theory of the discipline. Exercises are focused on practical topics presented in lectures. Teaching is suplemented by practical laboratory work.

The assessment of a student is made upon a quality of a discussion on topics selected at the colloquium (lecture notes allowed at preparation).

The presence of students at practice is obligatory and is monitored by a tutor. The way how to compensate missed practice lessons will be decided by a tutor depending on the range and content of the missed lessons.

Lecture 1 - Introduction to low-dimensional structures, bottom-up and self-assembly. General introduction, quantum dots, fullerenes, nanowires, 2D materials, chemical approaches to growth, physical approaches to growth, self-assembly

Lecture 2 - Top-down technology, Hybrid approaches. SPM-based lithography, Resist based technology (optical and electron beam lithography), hybrid approaches to assembly)

Lecture 3 - Magnetron/Ion Beam sputtering, evaporation and spintronics. Different thin film growth strategies, ranging from evaporation to sputtering techniques. Epitaxial films and heterostructures. Semiconductor multilayer structures and magnetic recording media.

Lecture 4 - Molecular beam epitaxy. Molecular beam epitaxy will be explained with emphasis on applications in solid state lasers

Lecture 5 - Etching and Chemical Vapor Deposition. Wet and dry etching will be briefly discussed. Chemical Vapor Deposition will be explained, including doping in nanostructures and blue diode story.

Lecture 6 - Atomic Layer Deposition. The lecture will provide a brief overview of technology used in semiconductor industry. Most important technological landmarks will be introduced, with emphasis on Atomic Layer Deposition.

Lecture 7 - Focused Particle Beam enhanced lithography. Interactions of primary ions with condensed matter, focused ion beam system technology, micro- and nanofabrication, focused ion beam induced processes and general and special applications of FIB

Lecture 8 - Composition and structure of low dimensional structures. A general overview on the structural and composition analysis tools of thin films and nanostructures will be given, including x-ray diffraction, spectroscopic ellipsometry, SEM/TEM, and surface science analytical techniques with high spatial resolution.

The calculation of supportive theoretical examples and practical demonstrations and testing take place during the whole semester.