Principles of Equipment for Physical Technologies (FSI-TPZ-A)

Academic year 2025/2026
Supervisor: prof. RNDr. Tomáš Šikola, CSc.  
Supervising institute: ÚFI all courses guaranted by this institute
Teaching language: English
Aims of the course unit:
 
Learning outcomes and competences:
 
Prerequisites:
 
Course contents:
 
Teaching methods and criteria:
 
Assesment methods and criteria linked to learning outcomes:
 
Controlled participation in lessons:
 
Type of course unit:
    Lecture  13 × 2 hrs. optionally                  
    Exercise  6 × 1 hrs. compulsory                  
    Computer-assisted exercise  7 × 1 hrs. compulsory                  
Course curriculum:
    Lecture Introduction to physical technologies.
Summary and characterization of selected physical technologies and analytical methods.
Application of physical technologies: from surfaces to nanotechnologies.
Principles and tools of physical technologies.
Electron sources (Electron emission, Extraction and forming of electron beams, Particle optical aberrations, Design of electron beam sources).
Ion beam sources (Ion preparation methods, Electron impact ion beam sources, Plasma, Ion extraction from plasma, Extraction ad forming of ion beams, Ion beam parameters, Plasma ion beam sources).
Atomic and molecular beam sources (Atomic source overview, Gas effusion, Angular distribution of particle flux from the slit, Emissive diagram of neutral beam particle sources, Collimator, Thermal atomic beam sources).
Fundamentals of particle optics (Analogy between particle and geometrical optics, Laplace equation, Paraxial equation of trajectory, Role of lenses in particle optics, Analytical methods in particle optics, Particles in magnetic fields, Scheme of the simple particle optic system, Distribution of the potential on the axis, Computer simulation of ion and electron beams, Space charge).
Interaction of particles with solids (Interaction of electrons and ions with surfaces, Scattering, Sputtering, Channelling, Interaction spectra)
Physical technologies (Deposition of thin films and coatings: CVD, PECVD, PVD, magnetron sputtering, ion beam sputtering, direct ion beam deposition, plasma and ion beam etching, lithography, implantation, epitaxy: MBE, MOMBE).
New trends in physical technologies.
    Exercise In addition to calculation of supportive theoretical examples (taking place during the whole semester), the students work on individual projects (computer code SIMION).
    Computer-assisted exercise At practicing in a computational lab the students will learn to use a computer code SIMION for a design of optical systems of electron and ion beam facilities.
Literature - fundamental:
1. BRODIE, I. - MURAY, J. J.: The Physics of Micro/Nano-Fabrication
2. CHEN, F. F.: Úvod do fyziky plazmatu
3. VÁLYI, L.: Atom and Ion Sources
4. L. ECKERTOVÁ: Fyzikální elektronika pevných látek, Karolinum, Praha 1992
5. J. C. RIVIERE: Surface Analytical Techniques, Clarendon Press, Oxford 1990
6. D. HALLIDAY, R. RESNICK, J. WALKER: Fyzika. (2. přepracované vydání.) VUTIUM, Brno 2013
Literature - recommended:
1. ECKERTOVÁ, L.: Fyzika tenkých vrstev
2. ECKERTOVÁ, L.: Elektronika povrchů
3. RIVIERE, J. C.: Surface Analytical Techniques
The study programmes with the given course:
Programme Study form Branch Spec. Final classification   Course-unit credits     Obligation     Level     Year     Semester  
BPC-NCP full-time study --- no specialisation -- Cr,Ex 3 Compulsory 1 2 S
B-FIN-P full-time study --- no specialisation -- Cr,Ex 3 Compulsory 1 3 S
B-STI-Z visiting student --- no specialisation -- Cr,Ex 3 Recommended course 1 1 S